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A study on the energy distribution for grid-assisting magnetron sputtering
| Citace: |
JUNG, M., HOUŠKA, J., BAROCH, P., VLČEK, J., MUSIL, J., NAM, K., HAN, J. A study on the energy distribution for grid-assisting magnetron sputtering. In Abstracts. Düsseldorf: VDI-Technologiezentrum, 2004. s. 332-.
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| Druh: | STAŤ VE SBORNÍKU |
| Jazyk publikace: | eng |
| Anglický název: | A study on the energy distribution for grid-assisting magnetron sputtering |
| Rok vydání: | 2004 |
| Místo konání: | Düsseldorf |
| Název zdroje: | VDI-Technologiezentrum |
| Autoři: | Min. J. Jung , Jiří Houška , Pavel Baroch , Jaroslav Vlček , Jindřich Musil , K.H. Nam , J.G. Han |
| Abstrakt EN: | The energy distributions of ionized particles impinging on growing films are of crucial importance in the structure and properties of films prepared by magnetron sputtering.This is particularly important in case of thin-film deposition at low temperatures where the film growth occurs under highly non-equilibrium conditions. |
| Klíčová slova |
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