OPTIMIZATION OF THIN TRANSPARENT CONDUCTIVE ZNO:AL FILM FOR NANOSTRUCTURED PIEZOELECTRIC ENERGY HARVESTE
NOVÁK, P., BRISCOE, J., NETRVALOVÁ, M., KOZÁK, T. OPTIMIZATION OF THIN TRANSPARENT CONDUCTIVE ZNO:AL FILM FOR NANOSTRUCTURED PIEZOELECTRIC ENERGY HARVESTE. Řecko, 2016.
|Anglický název:||OPTIMIZATION OF THIN TRANSPARENT CONDUCTIVE ZNO:AL FILM FOR NANOSTRUCTURED PIEZOELECTRIC ENERGY HARVESTE|
|Autoři:||Ing. Petr Novák Ph.D. , Joe Briscoe , Ing. Marie Netrvalová Ph.D. , Ing. Tomáš Kozák Ph.D.|
|Abstrakt EN:||Transparent conductive oxides (TCOs) are a class of materials which combines high optical transmittance in the visible spectrum with a resistivity below 10-3 Ωcm. Nowadays, indium tin oxide (ITO) and Al-doped zinc oxide (AZO) thin films are the most used TCOs. The AZO films are considered as a cheap and non-toxic alternative to ITO, but it is more difficult to achieve similar values of the resistivity. The subject of presented work is replacing the preferably used ITO films by an AZO film in nanostructured piezoelectric energy harvesters based on the ZnO nanorods. The AZO films were prepared by magnetron sputtering. The electrical properties were obtained by the Hall measurement system. The prepared films were also successfully tested as the seed layer for the growth of the nanorods and the influence of the surface morphology on the size and density of the formed nanorods were studied as well.|