Sputtered AZO films for ZnO-nanorod-based piezoelectric nanogenerator
NOVÁK, P., BRISCOE, J., KOZÁK, T., BACHRATÁ, Š. Sputtered AZO films for ZnO-nanorod-based piezoelectric nanogenerator. Štrasburk, 2017.
|Anglický název:||Sputtered AZO films for ZnO-nanorod-based piezoelectric nanogenerator|
|Autoři:||Ing. Petr Novák Ph.D. , Joe Briscoe , Ing. Tomáš Kozák Ph.D. , Ing. Štěpánka Bachratá|
|Abstrakt EN:||Transparent conductive oxides (TCOs) are a class of materials which combines high optical transmittance in the visible spectrum with a resistivity below 10-3 Ωcm. Indium tin oxide (ITO) is the most used TCO.The Aluminium doped zinc oxide (AZO) is considered as a cheap and non-toxic alternative to ITO, but the process window for sputtering of AZO with suitable properties is narrower than for ITO. The subject of the present work is replacing the preferably-used ITO by an AZO in ZnO-nanorod-based devices. The investigated AZO films with thickness up to 300nm were deposited on PET substrate at temperatures up to 100°C. The study was focused on the relation between electrical properties and film structure.|